KLA D-600


OPERATING INSTRUCTIONS | MORE INFO

GENERAL INFORMATION

The Alpha-Step D-600 profilometer is designed for measuring surface texture (RMS) and step height. The stage is motorized with a 150 x 178 mm range. The tip is 20 um wide with a 60 degrees head.

SCAN PARAMETERS

Up to 55mm in a single scan. Vertical range of 1,200 um. Please make sure to use the scan speed suitable for your samples and the step height in order to prevent damaging the stylus. Step height measurements repeatability (according to manufacturer is 5A on a 1 um step).

CONTACT INFORMATION
For additional information about the Wyko NT9100 Profiler, please contact James Vichiconti at jv2534@columbia.edu or the clean room staff at cnicleanroom@columbia.edu.