KLA P-17 STYLUS PROFILER


STANDARD OPERATING PROCEDURE

GENERAL INFORMATION
The Tencor P-17 is the eighth generation of the P-series stylus profilers. The system offers a programmable scan stage, low noise, and sub-angstrom electronic resolution throughout the vertical range, enabling high resolution scans across the entire sample surface. The P-17 includes a 200mm scan stage for measurement of the entire substrate without stitching. An UltraLite® sensor assembly combines a large, linear vertical range with constant force control to measure a wide variety of materials and topographies. Top and side view optics are available to enable easy site teaching, pattern recognition, and visualization of the stylus during a measurement. The P-17 applications include step height, roughness, and stress metrology for AlTiC, GaAs, Si, SiC, and sapphire wafers for use in semiconductors, power devices, wireless, LED, and data storage.

SCAN PARAMETERS

Constant force control from 0.3 to 50 mg.

Vertical range from 10 nm to 327 microns

200 mm scanning stage

5 mexapixel video camera with top and side viewing.

CONTACT INFORMATION
For additional information about the KLA P-17 Profiler, please contact CNI cleanroom staff at: cniCR@lists.columbia.edu.