ACROSS INTERNATIONAL TF17000 FURNACE

GENERAL INFORMATION

The Across International TF17000 annealing furnace is a programmable single-zone closed-shell furnace with a 120 x 1000 mm alumina tube allowing anneals up to 1700 °C in 4 different environments: Air, Oxygen, Nitrogen, Argon (flow of only 1 gas allowed at a time). Loading of up to 4” wafers and sample-sized pieces is possible.

The furnace is equipped with a Eurotherm controller for 8-segment (ramp up, dwell, ramp down) of programmable control and data logging with PC interface.

Max ramp: 10 °C/min <1200 °C
                   5 °C/min >1200 °C

Min Ramp: 1 °C/min

RESTRICTIONS:

We operate with 2 different alumina tubes: metal-free and metal-contaminated. Ask cleanroom staff to inquire which tube is currently in the furnace.

Anneals at 1700 °C are restricted to 2 hours.

UL/CSA certified.

FOR INFORMATION: please contact the clean room staff at: cniCR@columbia.edu.