REYNOLDSTECH PHOTOLITHOGRAPHY HOODS AND SPINNERS

Lithography spinner hoods in the cleanroom used for applying photoresist to wafers before photolithography.

OPERATING INSTRUCTIONS |

GENERAL INFORMATION

The CNI cleanroom’s lithography processing area contains three stainless steel ReynoldsTech fume hoods, outfitted with:

  • Three programmable FS5.0 spincoating stations (w/ one dedicated to SU8 and LOR processes) with recipe memory

  • Three Electronic Micro Systems vacuum hotplates (<200C)

  • Four DI water and six nitrogen guns

  • Two heated water/ultrasonic baths (for solvent heating/agitation)

  • Two DI water sinks with cascade rinse

The CNI cleanroom provides consumables including glassware, disposable pipettes, syringes with filter tips and pipette tips (various sizes) for the house Eppendorf M4 repeating pipettors.

The photoresists supplied by the clean room are (some other types may be available with no guarantee on expiration date):

  • S1805, S1811 and S1818

  • 495 PMMA A4

  • 950 PMMA A2

  • LOR 5A, 3A, AND 30B

  • SU8 3005, 3010, and 3050

  • maN-2403

  • ZEP 520A (by request)

  • AZ nLOF 2020

  • SPR 220-7.0 (will be phased out)

  • SPR 220-4.5

  • AZ 10XT

  • HSQ 6% in MIBK (by request)

  • mr-DWL 5

CNI provides TMAH-based developers (AZ 300 MIF, AZ 400K, MF CD-26/24A), SU-8 developer and MIBK.

Staff approval is required to bring chemicals/photoresist into the cleanroom.

CONTACT INFORMATION

Clean room staff: cniCR@columbia.edu.