REYNOLDSTECH PHOTOLITHOGRAPHY HOODS AND SPINNERS
+ SHARED LABS HOME
+ EXTERNAL USER PROGRAM
+ CNI LABS NEWSLETTER
+ BADGER
+ CLEAN ROOM
- CLEAN ROOM HOME
- CLEAN ROOM ACCESS PROTOCOL
- EQUIPMENT TRAINING
- PROCESS & FABRICATION
- EQUIPMENT LIST
- EQUIPMENT RATES & SUPERUSERS
- EQUIPMENT STATUS
- SAFETY
- RELATED LINKS
+ ELECTRON MICROSCOPY
- EM LAB HOME
- SERVICE REQUEST FORM
- EM LAB ACCESS
- TRAINING & CERTIFICATION
- EQUIPMENT LIST & RATES
- FEI TALOS S-TEM
- ZEISS SIGMA VP SEM
- EM IMAGE GALLERY
+ SHARED MATERIAL CHARACTERIZATION LAB
OPERATING INSTRUCTIONS |
GENERAL INFORMATION
The CNI cleanroom’s lithography processing area contains three stainless steel ReynoldsTech fume hoods, outfitted with:
Three programmable FS5.0 spincoating stations (w/ one dedicated to SU8 and LOR processes) with recipe memory
Three Electronic Micro Systems vacuum hotplates (<200C)
Four DI water and six nitrogen guns
Two heated water/ultrasonic baths (for solvent heating/agitation)
Two DI water sinks with cascade rinse
The CNI cleanroom provides consumables including glassware, disposable pipettes, syringes with filter tips and pipette tips (various sizes) for the house Eppendorf M4 repeating pipettors.
The photoresists supplied by the clean room are (some other types may be available with no guarantee on expiration date):
S1805, S1811 and S1818
495 PMMA A4
950 PMMA A2
LOR 5A, 3A, AND 30B
SU8 3005, 3010, and 3050
maN-2403
ZEP 520A (by request)
AZ nLOF 2020
SPR 220-7.0 (will be phased out)
SPR 220-4.5
AZ 10XT
HSQ 6% in MIBK (by request)
mr-DWL 5
CNI provides TMAH-based developers (AZ 300 MIF, AZ 400K, MF CD-26/24A), SU-8 developer and MIBK.
Staff approval is required to bring chemicals/photoresist into the cleanroom.
CONTACT INFORMATION
Clean room staff: cniCR@columbia.edu.