PROCESS AND FABRICATION
+ SHARED LABS HOME
+ EXTERNAL USER PROGRAM
+ CNI LABS NEWSLETTER
+ BADGER
+ CLEAN ROOM
- CLEAN ROOM HOME
- CLEAN ROOM ACCESS PROTOCOL
- EQUIPMENT TRAINING
- PROCESS & FABRICATION
- EQUIPMENT LIST
- EQUIPMENT RATES & SUPERUSERS
- EQUIPMENT STATUS
- SAFETY
- RELATED LINKS
+ ELECTRON MICROSCOPY
- EM LAB HOME
- SERVICE REQUEST FORM
- EM LAB ACCESS
- TRAINING & CERTIFICATION
- EQUIPMENT LIST & RATES
- FEI TALOS S-TEM
- ZEISS SIGMA VP SEM
- EM IMAGE GALLERY
+ SHARED MATERIAL CHARACTERIZATION LAB
A great resource library for nanofabricaiton processes can be found on the UC Berkley website.
SILICON WAFERS
Silicon wafer manufacturing
THIN FILM DEPOSITION
Electron beam evaporation
Tooling factor calibration SOP
Sputtering deposition Introduction
LITHOGRAPHY
Photolithography Introduction
Spin Coating Processes
PHOTORESISTS DATA SHEETS
RESIST PROCESSING
PMMA SOP
LOR Photoresist Series
Photolithography Negative
SHIPLEY 1800 Series
SU8 Photoresist
ETCHING
Dry Etch Basics
DEVELOPER
AZ 300MIF Developer
AZ 400K Developer
SU8 Developer
CLEANING
RCA clean - basics
AZ 300T & 400T Stripper
Remover PG
WAFERS DICING
Dicing saw