RAPID THERMAL ANNEAL
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GENERAL INFORMATION | SOP
The Rapid Thermal Anneal (RTA), Solaris 100 system performs short thermal treatments at temperatures of up to 1,100C for periods of up to 2 min. Heating is performed by a quartz lamp at a rate of up to 50C per second. Nitrogen or oxygen environment are available.
FOR INFORMATION: please contact the clean room staff at: cniCR@columbia.edu.