REYNOLDSTECH WET PROCESSING STATIONS

GENERAL INFORMATION

The wet etch bay consists of two hoods for acids and caustic wet processing and of an RCA station (SC1, SC2, and HF dip). Training is required in order to use the hoods.

The chemicals supplied by the clean room are:

• Hydrofluoric Acid

• Nitric Acid

• Buffered Oxide Etch 5:1

• Buffered Oxide Etch 20:1

• Buffered Oxide Etch 50:1

• Chrome Etch

• Gold Etch

• Aluminum Etch

• Hydrochloric Acid

• Sulfuric Acid

• Phosphoric Acid

• RSE 5-6-3

• Acetic Acid

• Potassium Hydroxide

• Hydrogen Peroxide

• Ammonium Hydroxide

Bringing in chemicals into the cleanroom requires specific approval by the clean room staff.

CONTACT INFORMATION
For additional information about the wet processing hoods or to request training, please contact James Vichiconti or contact the clean room staff at: cniCR@columbia.edu.