REYNOLDSTECH WET PROCESSING STATIONS
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GENERAL INFORMATION
The wet etch bay consists of two hoods for acids and caustic wet processing and of an RCA station (SC1, SC2, and HF dip). Training is required in order to use the hoods.
The chemicals supplied by the clean room are:
Hydrofluoric Acid
Nitric Acid
Buffered Oxide Etch 5:1
Buffered Oxide Etch 20:1
Buffered Oxide Etch 50:1
Chrome Etch
Gold Etch
Aluminum Etch
Hydrochloric Acid
Sulfuric Acid
Phosphoric Acid
RSE 5-6-3
Acetic Acid
Potassium Hydroxide
Hydrogen Peroxide
Ammonium Hydroxide
Bringing in chemicals into the cleanroom requires specific approval by the clean room staff.
CONTACT INFORMATION
For additional information about the wet processing hoods or to request training, please contact the clean room staff at: cniCR@columbia.edu.