WOOLLAM VARIABLE-ANGLE SPECTROSCOPIC ELLIPSOMETER
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GENERAL INFORMATION | STANDARD OPERATING PROCEDURE
Ellipsometry measures changes in light polarization to determine a film’s thickness and optical constants. The VASE system allows continuous adjustment of the angle of incidence. The system is equipped with a Si/InGaAs detector with range from 190-2500 nm.
The system is equipped with the alternate focusing attachment, allowing analysis spot size of ~200 microns.
For more information please contact Dr. Philippe Chow.