WOOLLAM VARIABLE-ANGLE SPECTROSCOPIC ELLIPSOMETER


GENERAL INFORMATION | STANDARD OPERATING PROCEDURE

Ellipsometry measures changes in light polarization to determine a film’s thickness and optical constants. The VASE system allows continuous adjustment of the angle of incidence. The system is equipped with a Si/InGaAs detector with range from 190-2500 nm.

The system is equipped with the alternate focusing attachment, allowing analysis spot size of ~200 microns.

For more information please contact Dr. Philippe Chow.