WYKO NT9100 OPTICAL PROFILER

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GENERAL INFORMATION
The Wyko NT9100 Optical Profile employs coherence scanning interferometry, also known as white-light interferometry, white-light confocal, or vertical scanning interferometry to produce high quality three-dimensional surface maps of the substrate with sub-nanometer vertical resolution. Surface roughness measurements are available as well as 3D surface profiling.

Potential applications: solar cells, MEMS, thick films, optics, ceramics, and advanced materials research.

SPECIFICATIONS
Measurement Capability: Non-contact, three-dimensional, topography and film thickness
Objectives: 10X and 50X
Vertical Resolution <0.1nm
RMS Repeatability 0.05nm
Lateral Spatial Sampling 0.1 to 13.2μm

3D SURFACE METROLOGY
3D surface metrology uses 3D surface profilers to provide non-contact measurement of surface features. These 3D surface profilers include white light based interferometric microscopes (optical profilers) and 3D confocal microscopes. Since the technology is non-contact, it is non-destructive, providing more repeatable and thus more effective surface imaging and measurement. 3D surface metrology offers the opportunity to generate an enhanced measurement set for accurate surface metrology quantification.

CONTACT INFORMATION
For additional information about the Wyko NT9100 Profiler, please contact James Vichiconti at jv2534@columbia.edu or contact the clean room staff at: cniCR@columbia.edu.