Yield Engineering Systems Vapor Priming System
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GENERAL INFORMATION
The YES (Yield Engineering Systems) Vapor Priming System is used to prepare substrates for optimal photoresist/electron beam resist coating. The instrument de-hydrates surfaces and deposits an ultra-thin coating of hexamethyldisilazane molecules from the vapor phase, which bond strongly to silicon oxide surfaces. The methyl groups in the tail portion of the molecule produce a stable hydrophobic surface that is ideal for uniformly applying photoresist.
CONTACT INFORMATION
For additional information about the YES oven or HMDS deposition please contact the clean room staff at: cniCR@columbia.edu.