CLEAN ROOM EQUIPMENT RATES AND SUPERUSERS
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Photolithography
| Equipment | CU User Rate | CU Staff Time | Min. Hrs | Max. Hrs | Ext. Academic Rate | Ext. Academic Staff Time | External Rate | External Staff Time | Superuser |
|---|---|---|---|---|---|---|---|---|---|
| Photoresist spinners | $17 | $45 | 0.5 | 3 | $20.4 | $54 | $51 | $135 | cniCR staff |
| Laurell Spin Coater | $17 | $45 | 0.5 | 3 | $20.4 | $54 | $51 | $135 | cniCR staff |
| YES HMDS Vapor Priming System | $17 | $45 | 0.5 | 4 | $20.4 | $54 | $51 | $135 | cniCR staff |
| Anatech Plasma Asher | $30 | $45 | 0.5 | 4 | $36 | $54 | $90 | $135 | cniCR staff |
| Suss MA6 Mask Aligner | $28 | $45 | 0.5 | 4 | $33.6 | $54 | $84 | $135 | Vivian Zhou |
| Suss DUV MA6 Mask Aligner | $33 | $45 | 0.5 | 4 | $39.6 | $54 | $99 | $135 | Vivian Zhou |
| Heidelberg DWL66+ Laser Writer | $33 | $45 | 0.5 | 10 | $39.6 | $54 | $99 | $135 | Vivian Zhou |
| Heidelberg μPG101 Laser Writer | $28 | $45 | 0.5 | 8 | $33.6 | $54 | $84 | $135 | Vivian Zhou |
E-beam Lithography
| Equipment | CU User Rate | CU Staff Time | Min. Hrs | Max. Hrs | Ext. Academic Rate | Ext. Academic Staff Time | External Rate | External Staff Time | Superuser |
|---|---|---|---|---|---|---|---|---|---|
| Nanobeam Ltd. nB4 E-beam Writing System | $55 | $4 | 0.25 | 8 | $66 | $54 | $165 | $135 | Jacob Amontree, Birui Yang |
| NPGS (Nabity) E-beam Writing on Nova Nano SEM | $28 | $45 | 0.5 | 8 | $33.6 | $54 | $84 | $135 | cniCR Staff |
| GenISys Beamer Proximity Effect Correction software | $25 | $45 | 0.5 | 8 | $30 | $54 | $75 | $135 | Shriddha Chaitanya |
Deposition and Thermal Anneal
| Equipment | CU User Rate | CU Staff Time | Min. Hrs | Max. Hrs | Ext. Academic Rate | Ext. Academic Staff Time | External Rate | External Staff Time | Superuser |
|---|---|---|---|---|---|---|---|---|---|
| Angstrom Engineering Evovac Deposition System | $35 | $45 | 0.5 | 4 | $42 | $54 | $105 | $135 | Duncan Wisniewski |
| Angstrom Engineering Evovac Deposition System (UHV) | $40 | $45 | 0.5 | 4 | $42 | $54 | $120 | $135 | Duncan Wisniewski |
| AJA Orion 3 Metal Sputtering System | $22 | $45 | 0.5 | 6 | $26.4 | $54 | $66 | $135 | Vikrant Kumar |
| AJA Orion 8 Dielectric Sputtering System | $25 | $45 | 0.5 | $30 | $54 | $75 | $135 | Vikrant Kumar | |
| Oxford Instruments PlasmaPro NGP80 PECVD | $45 | $45 | 0.5 | 4 | $54 | $54 | $135 | $135 | cniCR staff |
| Cambridge Nanotech Savannah 200 Atomic Layer Deposition System | $33 | $45 | 0.5 | 4 | $39.6 | $54 | $99 | $135 | cniCR staff |
| Edwards Auto 306 Thermal Evaporator | $20 | $45 | 0.5 | $24 | $54 | $51 | $135 | cniCR staff | |
| Expertech LPCVD and Annealing Furnace | $55 | $45 | 1 | 8 | $66 | $54 | $165 | $135 | cniCR staff |
| Rapid Thermal Anneal (RTA) system | $20 | $45 | 0.25 | 4 | $24 | $54 | $60 | $135 | cniCR staff |
Dry Etch & Wet Processing
| Equipment | CU User Rate | CU Staff Time | Min. Hrs | Max. Hrs | Ext. Academic Rate | Ext. Academic Staff Time | External Rate | External Staff Time | Superuser |
|---|---|---|---|---|---|---|---|---|---|
| Oxford Instruments Plasma Pro 100 Cobra Fluorine-based RIE/D-RIE | $45 | $45 | 0.5 | 4 | $54 | $54 | $135 | $135 | cniCR staff |
| Oxford Instruments Plasma Pro 100 Cobra Chlorine-based RIE/D-RIE | $45 | $45 | 0.5 | 4 | $54 | $54 | $135 | $135 | cniCR staff |
| Oxford Plasmalab80Plus ICP System | $40 | $45 | 0.5 | 4 | $48 | $54 | $120 | $135 | cniCR staff |
| Diener Plasma Etch System | $33 | $45 | 0.5 | 4 | $39.6 | $54 | $99 | $135 | cniCR staff |
| Wet Etch/Processing Benches | $15 | $45 | 0.5 | 3 | $18 | $54 | $45 | $135 | cniCR staff |
| UV Ozon | $10 | $45 | 0.25 | 3 | $12 | $54 | $30 | $135 | cniCR staff |
Back-end Processing
| Equipment | CU User Rate | CU Staff Time | Min. Hrs | Max. Hrs | Ext. Academic Rate | Ext. Academic Staff Time | External Rate | External Staff Time | Superuser |
|---|---|---|---|---|---|---|---|---|---|
| Bal-tec Critical Point Dryer | $17 | $4 | 0.5 | 3 | $20.4 | $54 | $51 | $135 | cniCR staff |
| SCS Labcoter 2 Parylene Deposition System | $17 | $45 | 0.5 | 6 | $20.4 | $54 | $51 | $135 | cniCR staff |
| Wire Bonder | $17 | $4 | 0.5 | 4 | $20.4 | $54 | $54 | $135 | Vikrant Kumar |
| Disco DAD 3220 Dicing Saw | $22 | $45 | 0.5 | 6 | $26.4 | $54 | $66 | $135 | Megan Noga |
| G&P Poli-400L Chemical Mechanical Polishing System | $55 | $45 | 1 | 6 | $66 | $54 | $165 | $135 | Shriddha Chaitanya |
Metrology
| Equipment | CU User Rate | CU Staff Time | Min. Hrs | Max. Hrs | Ext. Academic Rate | Ext. Academic Staff Time | External Rate | External Staff Time | Superuser |
|---|---|---|---|---|---|---|---|---|---|
| Park Atomic Force Microscope | $30 | $45 | 0.5 | 8 | $36 | $54 | $90 | $135 | Xuanjing Chu |
| KLA P-17 Stylus Profilometer | $17 | $45 | 0.5 | 2 | $20.4 | $54 | $51 | $135 | cniCR staff |
| Nanomagnetics ezAFM | $17 | $45 | 0.5 | 5 | $48 | $54 | $51 | $135 | cniCR staff |
| Lake Shore Hall Measurement system | $0 | $45 | 0.5 | 3 | $0 | $54 | $0 | $135 | cniCR staff |
| Wyko NT9100 Optical Profilometer | $20 | $45 | 0.5 | 3 | $24 | $54 | $60 | $135 | cniCR staff |
| FEI Nova NanoSEM 450 | $28 | $45 | 0.5 | 8 | $33.6 | $54 | $84 | $135 | cniCR staff |
Wafers, chemicals, tools, carriers, and more are available for purchase through CNI: Purchasable Inventory
Couldn’t find what you’re looking for? Check out the SMCL and EM equipment lists or download our equipment list flyer here.
All prices are in USD. Training sessions are chargeable (equipment time only). Internal Columbia University users who will use CNI designated grants to pay the user fees will get a 10% subsidy on top of internal rates.
A monthly membership fee of $50 per Columbia research group ($75 per other academic groups, and $150 for industry) will be applied to each invoice (for months of lab usage only). The revenue from the membership fee will be used for equipment refresh and replacement.