CLEAN ROOM EQUIPMENT RATES AND SUPERUSERS


Photolithography
Equipment CU User Rate CU Staff Time Min. Hrs Max. Hrs Ext. Academic Rate Ext. Academic Staff Time External Rate External Staff Time Superuser
Photoresist spinners $17 $45 0.5 3 $20.4 $54 $51 $135 cniCR staff
Laurell Spin Coater $17 $45 0.5 3 $20.4 $54 $51 $135 cniCR staff
YES HMDS Vapor Priming System $17 $45 0.5 4 $20.4 $54 $51 $135 cniCR staff
Anatech Plasma Asher $30 $45 0.5 4 $36 $54 $90 $135 cniCR staff
Suss MA6 Mask Aligner $28 $45 0.5 4 $33.6 $54 $84 $135 Vivian Zhou
Suss DUV MA6 Mask Aligner $33 $45 0.5 4 $39.6 $54 $99 $135 Vivian Zhou
Heidelberg DWL66+ Laser Writer $33 $45 0.5 10 $39.6 $54 $99 $135 Vivian Zhou
Heidelberg μPG101 Laser Writer $28 $45 0.5 8 $33.6 $54 $84 $135 Vivian Zhou
 
E-beam Lithography
Equipment CU User Rate CU Staff Time Min. Hrs Max. Hrs Ext. Academic Rate Ext. Academic Staff Time External Rate External Staff Time Superuser
Nanobeam Ltd. nB4 E-beam Writing System $55 $45 0.25 8 $66 $54 $165 $135 Jacob Amontree, Birui Yang
NPGS (Nabity) E-beam Writing on Nova Nano SEM $28 $45 0.5 8 $33.6 $54 $84 $135 cniCR Staff
GenISys Beamer Proximity Effect Correction software $25 $45 0.5 8 $30 $54 $75 $135 Shriddha Chaitanya
Elionix BODEN 50f EBL $50 $45 0.25 8 $60 $54 $150 $135 cniCR Staff
 
Deposition and Thermal Anneal
Equipment CU User Rate CU Staff Time Min. Hrs Max. Hrs Ext. Academic Rate Ext. Academic Staff Time External Rate External Staff Time Superuser
Angstrom Engineering Evovac Deposition System $35 $45 0.5 4 $42 $54 $105 $135 Duncan Wisniewski,Oliver Durnan
Angstrom Engineering Evovac Deposition System (UHV) $40 $45 0.5 4 $42 $54 $120 $135 Duncan Wisniewski,Oliver Durnan
AJA Orion 3 Metal Sputtering System $22 $45 0.5 6 $26.4 $54 $66 $135 Oliver Durnan
AJA Orion 8 Dielectric Sputtering System $25 $45 0.5 6 $30 $54 $75 $135 Oliver Durnan
Oxford Instruments PlasmaPro NGP80 PECVD $45 $45 0.5 4 $54 $54 $135 $135 cniCR staff
Cambridge Nanotech Savannah 200 Atomic Layer Deposition System $33 $45 0.5 4 $39.6 $54 $99 $135 cniCR staff
Edwards Auto 306 Thermal Evaporator $20 $45 0.5 $24 $54 $51 $135 cniCR staff
Rapid Thermal Anneal (RTA) system $20 $45 0.25 4 $24 $54 $60 $135 cniCR staff
 
Dry Etch & Wet Processing
Equipment CU User Rate CU Staff Time Min. Hrs Max. Hrs Ext. Academic Rate Ext. Academic Staff Time External Rate External Staff Time Superuser
Oxford Instruments Plasma Pro 100 Cobra Fluorine-based RIE/D-RIE $45 $45 0.5 4 $54 $54 $135 $135 cniCR staff
Oxford Instruments Plasma Pro 100 Cobra Chlorine-based RIE/D-RIE $45 $45 0.5 4 $54 $54 $135 $135 cniCR staff
Oxford Plasmalab80Plus ICP System $40 $45 0.5 4 $48 $54 $120 $135 cniCR staff
Diener Plasma Etch System $33 $45 0.5 4 $39.6 $54 $99 $135 cniCR staff
Wet Etch/Processing Benches $15 $45 0.5 3 $18 $54 $45 $135 cniCR staff
UV Ozon $10 $45 0.25 3 $12 $54 $30 $135 cniCR staff
 
Back-end Processing
Equipment CU User Rate CU Staff Time Min. Hrs Max. Hrs Ext. Academic Rate Ext. Academic Staff Time External Rate External Staff Time Superuser
Bal-tec Critical Point Dryer $17 $4 0.5 3 $20.4 $54 $51 $135 cniCR staff
SCS Labcoter 2 Parylene Deposition System $17 $45 0.5 6 $20.4 $54 $51 $135 cniCR staff
Wire Bonder $17 $4 0.5 4 $20.4 $54 $51 $135 CNICR Staff
Disco DAD 3220 Dicing Saw $22 $45 0.5 6 $26.4 $54 $66 $135 Megan Noga, CNICR staff
G&P Poli-400L Chemical Mechanical Polishing System $55 $45 1 6 $66 $54 $165 $135 Shriddha Chaitanya
 
Metrology
Equipment CU User Rate CU Staff Time Min. Hrs Max. Hrs Ext. Academic Rate Ext. Academic Staff Time External Rate External Staff Time Superuser
Woollam Alpha-SE Ellipsometer $17 $45 0.5 8 $20.4 $54 $51 $135 CNI staff
Park Atomic Force Microscope $30 $45 0.5 8 $36 $54 $90 $135 Xuanjing Chu
KLA P-17 Stylus Profilometer $17 $45 0.5 2 $20.4 $54 $51 $135 cniCR staff
Nanomagnetics ezAFM $17 $45 0.5 5 $48 $54 $51 $135 cniCR staff
Lake Shore Hall Measurement system $0 $45 0.5 3 $0 $54 $0 $135 cniCR staff
Wyko NT9100 Optical Profilometer $20 $45 0.5 3 $24 $54 $60 $135 cniCR staff
FEI Nova NanoSEM 450 $28 $45 0.5 8 $33.6 $54 $84 $135 cniCR staff

Wafers, chemicals, tools, carriers, and more are available for purchase through CNI: Purchasable Inventory

Couldn’t find what you’re looking for? Check out the SMCL and EM equipment lists or download our equipment list flyer here.

All prices are in USD. Training sessions are chargeable (equipment time only). Internal Columbia University users who will use CNI designated grants to pay the user fees will get a 10% subsidy on top of internal rates.

A monthly membership fee of $50 per Columbia research group ($75 per other academic groups, and $150 for industry) will be applied to each invoice (for months of lab usage only). The revenue from the membership fee will be used for equipment refresh and replacement.