AJA ORION 8 DIELECTRIC SPUTTERING
OPERATING INSTRUCTIONS |
This system consists of two 2” magnetron sputtering guns, 300W RF generator, auto matching network and a pulsed DC power supply. Substrates of up to 4” in size can be coated. They system is pumped down with a turbo pump and contains a load lock and is dedicated to dielectric film sputtering. Reactive sputtering with nitrogen or oxygen is available as well.
Materials available: Al3Nx, ZnO, SiOx, TiN, Al2O3. Other materials may be possible upon request.
Process gases: Ar, Oxygen/Nitrogen.