ANATECH PLASMA ASHER
+ SHARED LABS HOME
+ EXTERNAL USER PROGRAM
+ CNI LABS NEWSLETTER
+ BADGER
+ CLEAN ROOM
- CLEAN ROOM HOME
- CLEAN ROOM ACCESS PROTOCOL
- EQUIPMENT TRAINING
- PROCESS & FABRICATION
- EQUIPMENT LIST
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+ ELECTRON MICROSCOPY
- EM LAB HOME
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- FEI TALOS S-TEM
- ZEISS SIGMA VP SEM
- FEI TALOS S-TEM
- EM IMAGE GALLERY
+ SHARED MATERIAL CHARACTERIZATION LAB
ANATECH WEBSITE | OPERATING INSTRUCTIONS |
GENERAL INFORMATION
The Anatech plasma asher is consisting of a Quartz Inductive Coupled Plasma Chamber with a full opening door, digital display and touch panel control screen. The power source is a 1000 W allowing for a large variety of plasma processing with oxygen and forming gas. The system is typically used for photoresist ashing and descum post patterning.
CONTACT INFORMATION
For additional information about the Anatech Plasma Asher please contact the clean room staff at: cniCR@columbia.edu.