ANATECH PLASMA ASHER


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GENERAL INFORMATION

The Anatech plasma asher is consisting of a Quartz Inductive Coupled Plasma Chamber with a full opening door, digital display and touch panel control screen. The power source is a 1000 W allowing for a large variety of plasma processing with oxygen and forming gas. The system is typically used for photoresist ashing and descum post patterning.

CONTACT INFORMATION

For additional information about the Anatech Plasma Asher please contact James Vichiconti at jv2534@columbia.edu or the clean room staff at cnicleanroom@columbia.edu.