Reynoldstech Hoods and Spinners


OPERATING INSTRUCTIONS |

GENERAL INFORMATION

These new hoods and built in spinners were built by ReynoldsTech. Up to 10 recipes can be stored at any time and up to 100 data files can be stored in each recipe (1000 different files). Chucks of different sizes are available. They are for the general use and cannot be taken out of the clean room (enforced by cameras). Spinner 3 in Hood 3 is dedicated to negative resists, SU8 and LOR processes. Spinners 1 and 2 in Hood 1 are dedicated for the rest of the standard photoresist processes. The Laurel station is dedicated to non-standard materials.

The photoresists supplied by the clean room are:

  • S 1805, S 1811 and S 1818
  • 495 PMMA A4 and A6
  • 950 PMMA A4 and A6
  • LOR 5A and 3A, LOR 3B
  • SU8 2005 and 2050
  • maN-2403
  • ZEP 520A
  • N-LOF 2020
  • SPR 220-7.0

Bringing in photoresists or chemicals into the cleanroom requires specific approval by the clean room staff.

CONTACT INFORMATION
For additional information about the ReynoldsTech spinnters and hoods, please contact Dr. Jen Yu at jy2488@columbia.edu or email the clean room staff at cnicleanroom@columbia.edu.