Reynoldstech Hoods and Spinners


OPERATING INSTRUCTIONS |

GENERAL INFORMATION

These new hoods and built in spinners were built by ReynoldsTech. Up to 10 recipes can be stored at any time and up to 100 data files can be stored in each recipe (1000 different files). Chucks are for the general users and cannot be taken out of the clean room (enforced by cameras). Spinner 3 in Hood 3 is dedicated to SU8 and LOR processes. Spinners 1 and 2 in Hood 1 are dedicated for the rest of the standard photoresist processes. The Laurel station is dedicated to non-standard materials.

The photoresists supplied by the clean room are:

  • S 1811, S1813, and S1818.
  • 495 PMMA A4 and A6
  • 950 PMMA A4 and A6
  • LOR 5A and 3A
  • SU8 2005 and 2050

Bringing in photoresists or chemicals into the cleanroom requires specific approval by the clean room staff.

CONTACT INFORMATION
For additional information about the ReynoldsTech spinnters and hoods, please contact James Vichiconti at jv2534@columbia.edu or email the clean room staff at cnicleanroom@columbia.edu.