The Nova NanoSEM 450 is a Schottky Field Emission Scanning Electron Microscope (FE-SEM) that combines high- and low-voltage ultra-high resolution capabilities with low-vacuum, high-resolution imaging capabilities. The instrument features a two-mode final lens, beam deceleration and environmental SEM technologies, bringing unprecedented versatile capabilities to researchers and developers in the nanotechnology laboratory working with a variety of nano-materials and/or -devices.

The system can be used for e-beam writing with a NPGS Nanopattern Generation System (Nabity).

This SEM is located in CEPSR 10th floor cleanroom.

Clean room access is required.

Standard Microscopy Operating Procedure - (including NPGS section)

Extensive Manual

SPECIFICATIONS

• Manufacturer: FEI (currently supported by Thermo Fisher)

• Model: Nova Nano 450

• Resolution: 1.4nm

• Magnification: 35X to 1,000,000X

• Electron Gun: FEG with ultra-high brightness Schottky field emitter

• Extracting Voltage (Vext): 0 to 5kV

• Acceleration Voltage (Vacc): 50 eV to 30 kV

TRAINING

It is required to observe and train for your desired application with a co-worker or group mate with an application similar to yours. Once proficiency is achieved, contact the superuser listed in the table here for a certification session.

If you cannot find someone to shadow, please contact the Electron Microscopy Core and optionally, the Cleanroom Core if NPGS writing is needed.

SEM SUPERUSERS AND STAFF

Dr. Amirali Zangiabadi | az2476@columbia.edu (Microscopy-only)

Cleanroom staff | cniCR (NPGS lithography)

James Vichiconti | jv2534@columbia.edu (Cleanroom Director)