FEI-NOVA NANO SEM

The Nova NanoSEM 450 is a Schottky Field Emission Scanning Electron Microscope (FE-SEM) that combines high- and low-voltage ultra-high resolution capabilities with low-vacuum, high-resolution imaging capabilities. The instrument features a two-mode final lens, beam deceleration and environmental SEM technologies, bringing unprecedented versatile capabilities to researchers and developers in the nanotechnology laboratory working with a variety of nano-materials and/or -devices.

The system can be used for e-beam writing with a NPGS Nanopattern Generation System (Nabity).

This SEM is located in CEPSR 10th floor cleanroom.

Clean room access is required.

Standard Microscopy Operating Procedure - (including NPGS section)

Extensive Manual

SPECIFICATIONS

  • Manufacturer: FEI (Thermo Fisher)

  • Model: Nova Nano 450

  • Resolution: 1.4nm

  • Magnification: 35X to 1,000,000X

  • Electron Gun: FEG with ultra-high brightness Schottky field emitter

  • Extracting Voltage: 0 to 5kV

  • Acceleration Voltage: 50 eV to 30 kV

TRAINING

It is required to observe and train for your desired application with a co-worker or group mate with an application similar to yours. Once proficiency is achieved, contact the superuser listed in the table here for a certification session.

If you cannot find someone to shadow, please contact the Electron Microscopy Core and optionally, the Cleanroom Core if NPGS writing is needed.

SEM STAFF

Dr. Amirali Zangiabadi | az2476@columbia.edu (Microscopy-only)

Cleanroom staff | cniCR (NPGS lithography)