EQUIPMENT RATES AND SUPERUSERS


Equipment

Local Hourly Rate

Local Staff Time

Min Hours

Max Hours

Other Academic
Rate

Other Academic Staff Time Rate

External Rate

External Staff Time Rate

Superuser

Angstrom Metals Deposition System

$30**

$33.3

1

5

$36**

$40

$90**

$100

Matthew Yankowitz

Boyan Ivanov Penkov

AJA Sputter Metal Deposition System

TBD

$33.3

TBD

TBD

TBD

TBD

TBD

$100

Aida Colon

AJA Sputter Dielectric Deposition System

TBD

$33.3

TBD

TBD

TBD

TBD

TBD

$100

Aida Colon

Wet benches

17

$33.3

0.5

3

20

40

51

$100

Clean room Staff

Bal-Tec Critical Point Dryer

$15

$33.3

0.5

6

$18

$40

$45

$100

Steve Miller

Beamer

$15

$33.3

1

6

$18

$40

$45

$100

Steve Miller

KLA D-600 Profilometer

$17

$33.3

0.5

2

$20

$40

$51

$100

Clean room staff

Cambridge NanoTech ALD

$30

$33.3

1.5

3.5

$36

$40

$90

$100

Shrestha Sajan

Cressington Sputter Coater

$25

$33.3

0.5

3

$30

$40

$75

$100

Scott Trocchia

Diener Plasma Etch

$30

$33.3

1

2

$36

$40

$90

$100

Tim Olsen

Anatech Plasma Asher

TBD

$33.3

TBD

TBD

TBD

TBD

TBD

$100

Clean room Staff

Edwards Thermal Evaporator

$15

$33.3

2

3

$18

$40

$45

$100

Yuan Jia

Heidelberg (3um) Laser Writer

$25

$33.3

1

4

$30

$40

$75

$100

Aida Colon

Heidelberg DWL 66+ Laser Writer

$33

$33.3

0.5

10

$40

$40

$99

$100

Aida Colon

Gaurang Ravindra Bhatt

Litho Hoods (Spinners)

TBD

$33.3

TBD

TBD

TBD

TBD

TBD

$100

Clean room staff

Litho dirty spin station

15

$33.3

0.5

3

18

40

45

$100

Clean room staff

Nanobeam nB4

$50

$33.3

1

10

$60

$40

$150

$100

Cheng Tan En-Min Shih

FEI Nova Nano SEM and NPGS e beam writing

$25

$33.3

0.5

8

$30

$40

$75

$100

Ghidewon Arefe

Oxford ICP RIE

$35

$33.3

1

3.5

$42

$40

$105

$100

Jia Li (Leo)

Oxford F DRIE

TBD

$33.3

TBD

TBD

TBD

TBD

TBD

$100

Clean room staff

Oxford Cl RIE

TBD

$33.3

TBD

TBD

TBD

TBD

TBD

$100

Clean room staff

Oxford PECVD

$45

$33.3

1

10

$54

$40

$135

$100

Konstantinos Alexandrou

Parylene Coating

$15

$33.3

1.5

4

$18

$40

$45

$100

Christopher Choi

Suss MA6 Mask Aligner

$25

$33.3

0.5

2

$30

$40

$75

$100

Scott Trocchia

Gaurang Ravindra Bhatt

Suss DUV MA6 Mask Aligner

$33

$33.3

0.5

4

$40

$40

$99

$100

Samantha P. Roberts

Gaurang Ravindra Bhatt

Westbond Aluminum Wire Bonder

$20

$33.3

0.5

3

$24

$40

$60

$100

Jason Hon

Westbond Gold Wire Bonder

$25

$33.3

0.5

3

$30

$40

$75

$100

Jason Hon

Disco Dicing Saw

$20

$33.3

0.5

8

$24

$40

$60

$100

Oscar Adrian Jimenez Gordillo

Wyko NT9100 Optical Profiler

$20

$33.3

0.5

3

$24

$40

$60

$100

Boyan Penkov

Chemical Mechanical Polishing

TBD

$33.3

TBD

TBD

TBD

TBD

TBD

$100

Ipshita Datta

William Xingchen Ji

Expertech LPCVD Furnace

TBD

$33.3

TBD

TBD

TBD

TBD

TBD

$100

Samantha P. Roberts

 

**Plus $35 set-up charge for precious metals (will be incorporated into the hourly price starting June 1st 2017).

Rates are effective as of December 1, 2016 for Columbia Facilities users and are subject to change. Please note that tools located in the new clean room are not yet available to use. Our prices will be updated starting June 1st, 2017. Our new price list can be found here. New price list for industrial users can be found here.

Contact clean room staff regarding use by non-Columbia researchers.